| Quorum Q300T D turbomolecular pumped coater by Quorum Technologies is an advanced and powerful system designed for precise deposition of metal and conductive oxides layers. Equipped with Film Thickness Monitor (FTM), this system is capable of coating thin films with sub-nanometer precision and thickness ranging from single nanometers up to 1 micron. It is possible to sputter a wide range of both oxidizing and non-oxidizing metals such as Al, Cr, Ir, W, Cu, Ag, Au, Pt, Ir. Stabilized current output together with rotating stage with a diameter of 10 centimeters provide the uniform coating and are suitable for deposition of silicon wafers coatings, R&D corrosion protective layers, mirror coatings for the visible and infrared range, or preparation of samples for high-resolution magnification imaging, e.g. SEM. Q300T D supports also conductive oxide (ITO) sputtering which is commonly used in many branches of research and technology and therefore is recommended for deposition of transparent contacts for optoelectronic devices and fabrication of flexible transparent electronics using prefabricated masks.
Glass substrates with 100 nm thick metal films (Ag, Pt, Cr, Al) deposited with Q300T D sputter-coater.
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